Micro Electro Mechanical Systems Conference 2026

The 39th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2026) is one of the premier annual events reporting research results on every aspect of MEMS and Microsystems technology, as well as their relevant technologies and industrial trends. In particular, IEEE MEMS 2026 will bring more industrial elements to broaden the impact towards various application scenarios, showing its significance on more-than-Moore era. The major areas of activity in the development of MEMS solicited and expected at this conference include but are not limited to:

• Design, simulation and analysis tools with experimental verification
• Fabrication technologies and processes
• Silicon and non-silicon materials
• Electro-mechanical integration techniques
• Assembly and packaging approaches
• Metrology and operational evaluation techniques
• System architecture

The major areas of activity in the application of MEMS solicited and expected at this conference include but are not limited to:

• Mechanical, thermal, and magnetic sensors and actuators, and system
• Opto-mechanical microdevices and microsystems
• Fluidic microcomponents and microsystems
• Microdevices for data storage
• Microdevices for biomedical engineering
• Micro chemical analysis systems
• Microdevices and systems for wireless communication
• Microdevices for power supply and energy harvesting
• Nano-electro-mechanical devices and systems
• Scientific microinstruments